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![Design and Manufacturing of Active Microsystems (Microtechnology and MEMS)](https://www.gfxtra31.com/uploads/posts/2020-11/16054837215fb1bcc9db9c8.jpg)
Design and Manufacturing of Active Microsystems (Microtechnology and MEMS)
456 pages | English | ISBN-10: 3642129021 | ISBN-13: 978-3642129025
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