Poly-SiGe for MEMS-above-CMOS Sensors (Springer Series in Advanced Microelectronics)

199 pages | English | ISBN-10: 9400767986 | ISBN-13: 978-9400767980

https://www.amazon.com/Poly-SiGe-MEMS-above-CMOS-Springer-Advanced-Microelectronics/dp/9400767986

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